Submicron lithography / Phillip D. Blais, chairman/editor ; in cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Materials Research Society, March 29-30, 1982, Santa Clara, California. (Proceedings of SPIE--the International Society for Optical Engineering ; v. 333)

Submicron lithography / Phillip D. Blais, chairman/editor ; in cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Materials Research Society, March 29-30, 1982, Santa Clara, California.

(Proceedings of SPIE--the International Society for Optical Engineering ; v. 333)

Call No. (NDL): M15-A5689
Bibliographic ID of National Diet Library: 000003097495

Material type: 図書

Author: Blais, Phillip D.ほか

Publisher: International Society for Optical Engineering

Publication date: 1982.

Material Format: Paper

Capacity, size, etc.: viii, 179 p. : ill. ; 28 cm.

NDC: -

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Paper

Material Type: 図書
ISBN: 0892523689 (pbk.)
Title: Submicron lithography / Phillip D. Blais, chairman/editor ; in cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Materials Research Society, March 29-30, 1982, Santa Clara, California.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 333
Author Heading: Blais, Phillip D.
International Society for Hybrid Microelectronics.
Northern California Microphotomask/Masking Working Group.
Materials Research Society.
Publication, Distribution, etc.: Bellingham, Wash. : International Society for Optical Engineering
Publication Date: 1982.
Publication Date (W3CDTF): 1982
Extent: viii, 179 p. : ill. ; 28 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Photoresists -- Congresses.
Photolithography -- Congresses.
LCC: TK7874
DDC: 621.381/74
NDLC: M15
ND
Note (Bibliography): Includes bibliographical references and indexes.
Holding library: 国立国会図書館
Call No.: M15-A5689
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003097495
http://id.ndl.go.jp/bib/000003097495
LC Control Number: 82060280
https://lccn.loc.gov/82060280
Bibliographic Record Category (NDL): 211