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A study of wear-out and breakdown phenomena in thin silicon dioxide films and the evaluation techniques
A study of wear-out and breakdown phenomena in thin silicon dioxide films and the evaluation techniques
Paper
博士論文
Koji Eriguchi
[著]
[
Koji Eriguchi
]
2003
<UT51-2004-C110>
National Diet Library
2003 8th International Symposium on Plasma- and Process-Induced Damage, April 24-25, 2003, Corbeil-Essonnes, France
2003 8th International Symposium on Plasma- and Process-Induced Damage, April 24-25, 2003, Corbeil-Essonnes, France
Paper
図書
Koji Eriguchi
, S. Krishnan, and Terence Hook, editors
IEEE Operations Center
c2003
Other Libraries in Japan
2002 7th International Symposium on Plasma- and Process-Induced Damage
2002 7th International Symposium on Plasma- and Process-Induced Damage
Paper
図書
Terence Hook,
Koji Eriguchi
, and Calvin T. Gabriel, editors
AVS
c2002
Other Libraries in Japan
Japanese journal of applied physics : JJAP
Japanese journal of applied physics : JJAP
Paper
Digital
雑誌
The Japan Society of Applied Physics
2008-
<Z53-A375>
Available online
National Diet Library
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