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Bibliographic Record
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- Material Type
- 図書
- ISBN
- 0965157776
- Author/Editor
- Terence Hook, Koji Eriguchi, and Calvin T. Gabriel, editors
- Author Heading
- Publication, Distribution, etc.
- Publication Date
- c2002
- Publication Date (W3CDTF)
- 2002
- Size
- 28 cm
- Alternative Title
- Two thousand and two seventh International Symposium on Plasma- and Process-Induced Damage