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紫外レーザによるセンサデバイス用サファイヤウェハのマイクロファブリケーション
紫外レーザによるセンサデバイス用サファイヤウェハのマイクロファブリケーション
Paper
図書
堀澤秀之, 東海大学 [著]
[堀澤秀之]
2001-2003
<Y151-H13555037>
National Diet Library
Subject Heading
YAGレーザ / 第5高調波 / サファイヤ / レーザ微細加工 / 表面加工 / 短パルス・紫外レーザ /
熱影響層
/ 穴あけ加工
Reached to the end of result.
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