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一体型で
軸間干渉
率の極めて小さい2段の変位拡大てこ付きXYテーブルの開発
一体型で軸間干渉率の極めて小さい2段の変位拡大てこ付きXYテーブルの開発
Paper
図書
吉村, 靖夫, 東京工業高等専門学校
2000-2001
<Y151-H12555042>
National Diet Library
Subject Heading
精密位置決め XYテーブル 変位拡大てこ
軸間干渉
率 弾性ヒンジ 剛性 圧電素子 変位センサ
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