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広パラメータ領域での高気圧プラズマの生成法とその応用
広パラメータ領域での高気圧プラズマの生成法とその応用
Paper
図書
橘邦英, 京都大学 [著]
[橘邦英]
2003-2004
<Y151-H15340198>
National Diet Library
有機シリコン材料からの高品質ワイドギヤツプ半導体薄膜の作製
有機シリコン材料からの高品質ワイドギヤツプ半導体薄膜の作製
Paper
図書
畑中, 義式, 静岡大学
1994-1995
<Y151-H06650363>
National Diet Library
Subject Heading
有機シリコン リモートプラズマ シリコンカーバイド薄膜 ヘキサメチルジシラン
SiO2薄膜
水素ラジカル反応 プラズマCVD TEOS
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