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PLUG: A FORTRAN program for the analysis of PLUG flow reactors with gas-phase and surface chemistry SAND-96-8211 DE96 006552

PLUG: A FORTRAN program for the analysis of PLUG flow reactors with gas-phase and surface chemistry SAND-96-8211 DE96 006552
マイクロ規格・テクニカルリポート類
Larson, R. S1996<LS-DE96/006552>
国立国会図書館

Modeling high-density-plasma deposition of SiO(sub 2) in SiH(sub 4)/O(sub 2)/Ar SAND-97-8241 DE97 007010

Modeling high-density-plasma deposition of SiO(sub 2) in SiH(sub 4)/O(sub 2)/Ar SAND-97-8241 DE97 007010
マイクロ規格・テクニカルリポート類
Meeks, E, Larson, R. S, Ho, P, Apblett, C, Han, S. M1997<LS-DE97/007010>
国立国会図書館

Reaction mechanism for titanium nitride CVD from TiCl4 and NH3 SAND-96-8443 DE96 006535 CONF-96051101

Reaction mechanism for titanium nitride CVD from TiCl4 and NH3 SAND-96-8443 DE96 006535 CONF-96051101
マイクロ規格・テクニカルリポート類
Larson, R. S, Allendorf, M. D1995<LS-DE96/006535>
国立国会図書館

Results from modeling and simulation of chemical downstream etch systems SAND-96-8241 DE96 011072

Results from modeling and simulation of chemical downstream etch systems SAND-96-8241 DE96 011072
マイクロ規格・テクニカルリポート類
Meeks, E, Vosen, S. R, Shon, J. W, Larson, R. S, Fox, C. A1996<LS-DE96/011072>
国立国会図書館

PLUG: A FORTRAN PROGRAM FOR THE ANALYSIS OF PLUG FLOW REACTORS WITH GAS-PHASE AND SURFACE CHEMISTRY (SAND ; SAND-96-8211)

PLUG: A FORTRAN PROGRAM FOR THE ANALYSIS OF PLUG FLOW REACTORS WITH GAS-PHASE AND SURFACE CHEMISTRY (SAND ; SAND-96-8211)
紙図書
LARSON, R.S. (SANDIA LABS., LIVERMORE, CA (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1996.
全国の図書館
  • 著者標目LARSON, R.S.

REACTION MECHANISM FOR TITANIUM NITRIDE CVD FROM TICL/SUB 4/ AND NH/SUB 3/ (SAND ; SAND-96-8443)

REACTION MECHANISM FOR TITANIUM NITRIDE CVD FROM TICL/SUB 4/ AND NH/SUB 3/ (SAND ; SAND-96-8443)
紙図書
LARSON, R.S.// ALLENDORF, M.D. (SANDIA NATIONAL LABS., LIVERMORE, CA (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1995.
全国の図書館
  • 著者標目LARSON, R.S. ALLENDORF, M.D.

RESULTS FROM MODELING AND SIMULATION OF CHEMICAL DOWNSTREAM ETCH SYSTEMS (SAND ; SAND-96-8241)

RESULTS FROM MODELING AND SIMULATION OF CHEMICAL DOWNSTREAM ETCH SYSTEMS (SAND ; SAND-96-8241)
紙図書
MEEKS, E.// VOSEN, S.R.// SHON, J.W.// LARSON, R.S.// FOX, C.A.// BUCHENAUER. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1996.
全国の図書館
  • 著者標目MEEKS, E. VOSEN, S.R. SHON, J.W. LARSON, R.S. FOX, C.A. BUCHENAUER.

Size distribution of unburned aluminum particles in solid propellant rocket motor exhaust (Sandia report ; SAND-86-8224; DE86013376)

Size distribution of unburned aluminum particles in solid propellant rocket motor exhaust (Sandia report ; SAND-86-8224; DE86013376)
紙図書
Larson, R.S.Sandia National Labs.1986.6.
全国の図書館
  • 著者標目Larson, R.S.

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