A new method for detecting vacuum leakage of a pressure sensor using a pulse discharge technique

• 資料種別: 文書・図像類
• タイトル: A new method for detecting vacuum leakage of a pressure sensor using a pulse discharge technique
• 著者・編者: UEDA, M; KAGAWA, K; SUGINO, Y; MORIYA, K; J, CHEN; MATSUI, T
• 著者標目: UEDA, M; KAGAWA, K; SUGINO, Y; MORIYA, K; J, CHEN; MATSUI, T
• 出版事項: Iop Publishing Ltd
• 出版年月日等: 1997-02
• 出版年（W3CDTF）: 1997-02
• タイトル（掲載誌）: Journal of Physics -London- d Applied Physics
• 巻号年月日等（掲載誌）: 30
• 掲載巻: 30
• 掲載ページ: 703-707
• 本文の言語コード: eng
• 対象利用者: 一般
• 一般注記: 出版タイプ： AO; A new method for estimating the degree of vacuum of a pressure sensor has been proposed and demonstrated to be applicable for detecting vacuum leakage. The principle of this method is based on the discharge characteristics of Paschen's law. The shielding body case and the electrode terminals in the sensor are employed as the electrodes for the discharge. The discharge potential is measured under a linearly increasing voltage supply, and from this value the pressure in the sensor is estimated. The measurable range is between 80 and 200 Pa, leakage in pressure sensors.
• 連携機関・データベース: 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）; https://irdb.nii.ac.jp
• 提供元機関・データベース: 福井大学 : 福井大学学術機関リポジトリ