A new method for detecting vacuum leakage of a pressure sensor using a pulse discharge technique

Material type: 文書・図像類

Author: UEDA, Mほか

Publisher: Iop Publishing Ltd

Publication date: 1997-02

Material Format: Digital

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Note (General)：: A new method for estimating the degree of vacuum of a pressure sensor has been proposed and demonstrated to be applicable for detecting vacuum leakage...

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Material Type: 文書・図像類
Title: A new method for detecting vacuum leakage of a pressure sensor using a pulse discharge technique
Author/Editor: UEDA, M
KAGAWA, K
SUGINO, Y
MORIYA, K
J, CHEN
MATSUI, T
Author Heading: UEDA, M
KAGAWA, K
SUGINO, Y
MORIYA, K
J, CHEN
MATSUI, T
Publication, Distribution, etc.: Iop Publishing Ltd
Publication Date: 1997-02
Publication Date (W3CDTF): 1997-02
Periodical title: Journal of Physics -London- d Applied Physics
No. or year of volume/issue: 30
Volume: 30
Pages: 703-707
Text Language Code: eng
Target Audience: 一般
Note (General): A new method for estimating the degree of vacuum of a pressure sensor has been proposed and demonstrated to be applicable for detecting vacuum leakage. The principle of this method is based on the discharge characteristics of Paschen's law. The shielding body case and the electrode terminals in the sensor are employed as the electrodes for the discharge. The discharge potential is measured under a linearly increasing voltage supply, and from this value the pressure in the sensor is estimated. The measurable range is between 80 and 200 Pa, leakage in pressure sensors.
Source: https://u-fukui.repo.nii.ac.jp/?action=repository_action_common_download&item_id=23371&item_no=1&attribute_id=22&file_no=1
https://u-fukui.repo.nii.ac.jp/?action=repository_action_common_download&item_id=23371&item_no=1&attribute_id=22&file_no=1
Access Restrictions: 限定公開
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 福井大学 : 福井大学学術機関リポジトリ