並列タイトル等MONITORING OF SULFUR - CONTAING ADDITIVES IN COPPER ELECTRODEPOSITION BY ROTATING RING - DISK ELECTRODE AND COPPER ELECTRODEPOSITION FOR HYBRID BONDING
著作権情報学位規則第9条第2項により要約公開
1. A. V. N. Tran, L. D. Tran, H. V. Hoang, and K. Kondo, “A Rotating Ring Disk Electrode Study of Detect the Acceleration Effect of SPS and MPS in the Presence of Chloride ”, J. Surf. Finish. Soc. Japan, vol. 68, no. 8, pp. 472-473, 2017. DOI: 10.4139/sfj.68.472 2. A. V. N. Tran, H. V. Hoang, K. Kondo, and T. Hirato, “A Rotating Ring Disk Study of Accelerators with Cl- and Br- for Copper Damascence Electrodeposition”, J. Surf. Finish. Soc. Japan, vol. 69, no.8, pp. 352-355, 2018.DOI: 10.4139/sfj.69.352 3. A. V. N. Tran, H. V. Hoang, K. Kondo, and T. Hirato, “ Monitoring of SPS Concentration by the Ring Current Using a Rotating Ring-Disk Electrode with Dissolving Disk Copper to Refresh a Void Free Solution”, J. Electrochem. Soc., vol. 166, no. 14, pp. D742, 2019. DOI: 10.1149/2.0841914jes 4. A. V. N. Tran, K. Kondo, and T. Hirato, “High TEC Copper to Connect Copper Bond Pads for Low Temperature Wafer Bonding”, J. Solid State Sci. Technol., vol. 9, pp. 124003, 2020. DOI: 10.1149/2162-8777/abd14a 5. A. V. N. Tran, K. Kondo, and T. Hirato, “A Rotating Ring-Disk Study to Monitor the Concentration of 2M5S in Copper Low TEC Electrolyte”, J. Electrochem. Soc., 2021. (Accepted on 23rd April) DOI: 10.1149/1945-7111/abfb3b
連携機関・データベース国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）