イオウを含有する添加剤の回転リングｰディスク電極によるモニタリングとハイブリッド接合のための電気銅めっき

Material type: 博士論文

Author: トラン, バンナトアン

Publisher: Kyoto University

Publication date: 2021-05-24

Material Format: Digital

Capacity, size, etc.: -

Name of awarding university/degree: 京都大学,博士(エネルギー科学),Doctor of Energy Science

View All

Search by Bookstore

Holdings of Libraries in Japan

This page shows libraries in Japan other than the National Diet Library that hold the material.

List of Cooperating Institutions and Databases

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

Kyoto University Research Information Repository
Digital
You can check the holdings of institutions and databases with which Institutional Repositories DataBase(IRDB)(Institutional Repository) is linked at the site of Institutional Repositories DataBase(IRDB)(Institutional Repository).
Kyoto University Research Information Repository

Search by Bookstore

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Digital

Material Type: 博士論文
Title: イオウを含有する添加剤の回転リングｰディスク電極によるモニタリングとハイブリッド接合のための電気銅めっき
Author/Editor: トラン, バンナトアン
Author Heading: トラン, バンナトアン
Publication, Distribution, etc.: Kyoto University
Publication Date: 2021-05-24
Publication Date (W3CDTF): 2021-05-24
Alternative Title: MONITORING OF SULFUR - CONTAING ADDITIVES IN COPPER ELECTRODEPOSITION BY ROTATING RING - DISK ELECTRODE AND COPPER ELECTRODEPOSITION FOR HYBRID BONDING
Contributor: 平藤, 哲司
土井, 俊哉
三宅, 正男
Degree grantor/type: 京都大学
Date Granted: 2021-05-24
Dissertation Number: 甲第23396号
Degree Type: 博士(エネルギー科学)
Doctor of Energy Science
Text Language Code: eng
Subject Heading: Cuprous intermediate
SPS monitoring
2M5S monitoring
High TEC copper
Copper electrodeposition
NDC: 501
Target Audience: 一般
DOI: 10.14989/doctor.k23396
Access Restrictions: インターネット公開
Rights (production): 学位規則第9条第2項により要約公開
1. A. V. N. Tran, L. D. Tran, H. V. Hoang, and K. Kondo, “A Rotating Ring Disk Electrode Study of Detect the Acceleration Effect of SPS and MPS in the Presence of Chloride ”, J. Surf. Finish. Soc. Japan, vol. 68, no. 8, pp. 472-473, 2017. DOI: 10.4139/sfj.68.472 2. A. V. N. Tran, H. V. Hoang, K. Kondo, and T. Hirato, “A Rotating Ring Disk Study of Accelerators with Cl- and Br- for Copper Damascence Electrodeposition”, J. Surf. Finish. Soc. Japan, vol. 69, no.8, pp. 352-355, 2018.DOI: 10.4139/sfj.69.352 3. A. V. N. Tran, H. V. Hoang, K. Kondo, and T. Hirato, “ Monitoring of SPS Concentration by the Ring Current Using a Rotating Ring-Disk Electrode with Dissolving Disk Copper to Refresh a Void Free Solution”, J. Electrochem. Soc., vol. 166, no. 14, pp. D742, 2019. DOI: 10.1149/2.0841914jes 4. A. V. N. Tran, K. Kondo, and T. Hirato, “High TEC Copper to Connect Copper Bond Pads for Low Temperature Wafer Bonding”, J. Solid State Sci. Technol., vol. 9, pp. 124003, 2020. DOI: 10.1149/2162-8777/abd14a 5. A. V. N. Tran, K. Kondo, and T. Hirato, “A Rotating Ring-Disk Study to Monitor the Concentration of 2M5S in Copper Low TEC Electrolyte”, J. Electrochem. Soc., 2021. (Accepted on 23rd April) DOI: 10.1149/1945-7111/abfb3b
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 京都大学 : 京都大学学術情報リポジトリ