Optical microlithography : technology for the mid-1980s, March 31-April 1, 1982, Santa Clara, California / Harry L. Stover, chairman/editor. (Proceedings of SPIE--the International Society for Optical Engineering ; v. 334)

Optical microlithography : technology for the mid-1980s, March 31-April 1, 1982, Santa Clara, California / Harry L. Stover, chairman/editor.

(Proceedings of SPIE--the International Society for Optical Engineering ; v. 334)

国立国会図書館請求記号: ND386-A3
国立国会図書館書誌ID: 000003098144

資料種別: 図書

著者: Stover, Harry L.ほか

出版者: SPIE--the International Society for Optical Engineering

出版年: c1982.

資料形態: 紙

ページ数・大きさ等: viii, 265 p. : ill. ; 28 cm.

NDC: -

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資料に関する注記

一般注記：: "In cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Material...

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紙

資料種別: 図書
ISBN: 0892523697 (pbk.)
タイトル: Optical microlithography : technology for the mid-1980s, March 31-April 1, 1982, Santa Clara, California / Harry L. Stover, chairman/editor.
シリーズタイトル: Proceedings of SPIE--the International Society for Optical Engineering ; v. 334
著者標目: Stover, Harry L.
Society of Photo-optical Instrumentation Engineers.
出版事項: Bellingham, Wash. : SPIE--the International Society for Optical Engineering
出版年月日等: c1982.
出版年（W3CDTF）: 1982
数量: viii, 265 p. : ill. ; 28 cm.
出版地（国名コード）: US
本文の言語コード: eng
件名標目: 集積回路. Syusekikairo.
Microlithography -- Congresses.
Integrated circuits -- Very large scale integration -- Congresses.
リソグラフィー. Risogurahi.
LCC: TR940
DDC: 621.381/74
NDLC: ND386
一般注記: "In cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Materials Research Society."
書誌注記: Includes bibliographical references and indexes.
所蔵機関: 国立国会図書館
請求記号: ND386-A3
連携機関・データベース: 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
書誌ID（NDLBibID）: 000003098144
http://id.ndl.go.jp/bib/000003098144
LC control number: 82060282 //r852
https://lccn.loc.gov/82060282
整理区分コード: 211