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図書

Optical microlithography : technology for the mid-1980s, March 31-April 1, 1982, Santa Clara, California / Harry L. Stover, chairman/editor. (Proceedings of SPIE--the International Society for Optical Engineering ; v. 334)

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Optical microlithography : technology for the mid-1980s, March 31-April 1, 1982, Santa Clara, California / Harry L. Stover, chairman/editor.

(Proceedings of SPIE--the International Society for Optical Engineering ; v. 334)

Call No. (NDL)
ND386-A3
Bibliographic ID of National Diet Library
000003098144
Material type
図書
Author
Stover, Harry L.ほか
Publisher
SPIE--the International Society for Optical Engineering
Publication date
c1982.
Material Format
Paper
Capacity, size, etc.
viii, 265 p. : ill. ; 28 cm.
NDC
-
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Notes on use

Note (General):

"In cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Material...

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Paper

Material Type
図書
ISBN
0892523697 (pbk.)
Publication Date
c1982.
Publication Date (W3CDTF)
1982
Extent
viii, 265 p. : ill. ; 28 cm.
Place of Publication (Country Code)
US