X-ray lithography and applications of soft X-rays to technology : October 19-20, 1983, Upton, New York / Alan D. Wilson, chairman/editor ; cosponsors, National Synchrotron Light Source/Brookhaven National Laboratory, SPIE--the International Society for Optical Engineering.

• 資料種別: 図書
• ISBN: 0892524839 (pbk.)
• タイトル: X-ray lithography and applications of soft X-rays to technology : October 19-20, 1983, Upton, New York / Alan D. Wilson, chairman/editor ; cosponsors, National Synchrotron Light Source/Brookhaven National Laboratory, SPIE--the International Society for Optical Engineering.
• シリーズタイトル: Proceedings of SPIE--the International Society for Optical Engineering ; v. 448
• 著者標目: Wilson, Alan D.; National Synchrotron Light Source (Organization : U.S.); Society of Photo-optical Instrumentation Engineers.
• 出版事項: Bellingham, Wash., USA : SPIE-- the International Society for Optical Engineering
• 出版年月日等: 1983.
• 出版年（W3CDTF）: 1983
• 数量: vi, 140 p. : ill. ; 28 cm.
• 出版地（国名コード）: US
• 本文の言語コード: eng
• 件名標目: X-ray lithography -- Congresses.; X-rays -- Industrial applications -- Congresses.
• LCC: TK7836
• DDC: 621.3815/2
• NDLC: M15; ND
• 書誌注記: Includes bibliographies and index.
• 所蔵機関: 国立国会図書館
• 請求記号: M15-A2113
• 連携機関・データベース: 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• 書誌ID（NDLBibID）: 000003115465; http://id.ndl.go.jp/bib/000003115465
• LC control number: 83051563 //r85; https://lccn.loc.gov/83051563
• 整理区分コード: 211