X-ray lithography and applications of soft X-rays to technology : October 19-20, 1983, Upton, New York / Alan D. Wilson, chairman/editor ; cosponsors, National Synchrotron Light Source/Brookhaven National Laboratory, SPIE--the International Society for Optical Engineering. (Proceedings of SPIE--the International Society for Optical Engineering ; v. 448)

X-ray lithography and applications of soft X-rays to technology : October 19-20, 1983, Upton, New York / Alan D. Wilson, chairman/editor ; cosponsors, National Synchrotron Light Source/Brookhaven National Laboratory, SPIE--the International Society for Optical Engineering.

(Proceedings of SPIE--the International Society for Optical Engineering ; v. 448)

Call No. (NDL): M15-A2113
Bibliographic ID of National Diet Library: 000003115465

Material type: 図書

Author: Wilson, Alan D.ほか

Publisher: SPIE-- the International Society for Optical Engineering

Publication date: 1983.

Material Format: Paper

Capacity, size, etc.: vi, 140 p. : ill. ; 28 cm.

NDC: -

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Paper

Material Type: 図書
ISBN: 0892524839 (pbk.)
Title: X-ray lithography and applications of soft X-rays to technology : October 19-20, 1983, Upton, New York / Alan D. Wilson, chairman/editor ; cosponsors, National Synchrotron Light Source/Brookhaven National Laboratory, SPIE--the International Society for Optical Engineering.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 448
Author Heading: Wilson, Alan D.
National Synchrotron Light Source (Organization : U.S.)
Society of Photo-optical Instrumentation Engineers.
Publication, Distribution, etc.: Bellingham, Wash., USA : SPIE-- the International Society for Optical Engineering
Publication Date: 1983.
Publication Date (W3CDTF): 1983
Extent: vi, 140 p. : ill. ; 28 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: X-ray lithography -- Congresses.
X-rays -- Industrial applications -- Congresses.
LCC: TK7836
DDC: 621.3815/2
NDLC: M15
ND
Note (Bibliography): Includes bibliographies and index.
Holding library: 国立国会図書館
Call No.: M15-A2113
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003115465
http://id.ndl.go.jp/bib/000003115465
LC Control Number: 83051563 //r85
https://lccn.loc.gov/83051563
Bibliographic Record Category (NDL): 211