図書

X-ray lithography and applications of soft X-rays to technology : October 19-20, 1983, Upton, New York / Alan D. Wilson, chairman/editor ; cosponsors, National Synchrotron Light Source/Brookhaven National Laboratory, SPIE--the International Society for Optical Engineering. (Proceedings of SPIE--the International Society for Optical Engineering ; v. 448)

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X-ray lithography and applications of soft X-rays to technology : October 19-20, 1983, Upton, New York / Alan D. Wilson, chairman/editor ; cosponsors, National Synchrotron Light Source/Brookhaven National Laboratory, SPIE--the International Society for Optical Engineering.

(Proceedings of SPIE--the International Society for Optical Engineering ; v. 448)

Call No. (NDL)
M15-A2113
Bibliographic ID of National Diet Library
000003115465
Material type
図書
Author
Wilson, Alan D.ほか
Publisher
SPIE-- the International Society for Optical Engineering
Publication date
1983.
Material Format
Paper
Capacity, size, etc.
vi, 140 p. : ill. ; 28 cm.
NDC
-
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Paper

Material Type
図書
ISBN
0892524839 (pbk.)
Publication Date
1983.
Publication Date (W3CDTF)
1983
Extent
vi, 140 p. : ill. ; 28 cm.
Place of Publication (Country Code)
US