Optical microlithography IV : March 13-14, 1985, Santa Clara, California / Harry L. Stover, chairman/editor ; cooperating orgnization, the International Society for Hybrid Microelectronics. (Proceedings of SPIE--the International Society for Optical Engineering ; v. 538)
Optical microlithography IV : March 13-14, 1985, Santa Clara, California / Harry L. Stover, chairman/editor ; cooperating orgnization, the International Society for Hybrid Microelectronics.
(Proceedings of SPIE--the International Society for Optical Engineering ; v. 538)
国立国会図書館請求記号
M15-A1318
国立国会図書館書誌ID
000003126299
資料種別
図書
著者
Stover, Harry L.ほか
出版者
SPIE--the International Society for Optical Engineering