Optical microlithography IV : March 13-14, 1985, Santa Clara, California / Harry L. Stover, chairman/editor ; cooperating orgnization, the International Society for Hybrid Microelectronics.

• Material Type: 図書
• ISBN: 0892525738 (spine : pbk.)
• ISBN (error code): 0892525378 (pbk.)
• Title: Optical microlithography IV : March 13-14, 1985, Santa Clara, California / Harry L. Stover, chairman/editor ; cooperating orgnization, the International Society for Hybrid Microelectronics.
• Series Title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 538
• Author Heading: Stover, Harry L.; International Society for Hybrid Microelectronics.; Society of Photo-optical Instrumentation Engineers.
• Publication, Distribution, etc.: Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering
• Publication Date: c1985.
• Publication Date (W3CDTF): 1985
• Extent: vi, 260 p. : ill. ; 28 cm.
• Alternative Title: Optical microlithography 4.; Optical microlithography four.
• Place of Publication (Country Code): US
• Text Language Code: eng
• Subject Heading: Microlithography -- Congresses.; Integrated circuits -- Very large scale integration -- Congresses.
• LCC: TR940
• DDC: 621.381/74
• NDLC: M15; ND
• Note (Bibliography): Includes bibliographies.
• Holding library: 国立国会図書館
• Call No.: M15-A1318
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000003126299; http://id.ndl.go.jp/bib/000003126299
• LC Control Number: 85061232; https://lccn.loc.gov/85061232
• Bibliographic Record Category (NDL): 211