図書

Optical microlithography IV : March 13-14, 1985, Santa Clara, California / Harry L. Stover, chairman/editor ; cooperating orgnization, the International Society for Hybrid Microelectronics. (Proceedings of SPIE--the International Society for Optical Engineering ; v. 538)

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Optical microlithography IV : March 13-14, 1985, Santa Clara, California / Harry L. Stover, chairman/editor ; cooperating orgnization, the International Society for Hybrid Microelectronics.

(Proceedings of SPIE--the International Society for Optical Engineering ; v. 538)

Call No. (NDL)
M15-A1318
Bibliographic ID of National Diet Library
000003126299
Material type
図書
Author
Stover, Harry L.ほか
Publisher
SPIE--the International Society for Optical Engineering
Publication date
c1985.
Material Format
Paper
Capacity, size, etc.
vi, 260 p. : ill. ; 28 cm.
NDC
-
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Paper

Material Type
図書
ISBN
0892525738 (spine : pbk.)
ISBN (error code)
0892525378 (pbk.)
Title
Optical microlithography IV : March 13-14, 1985, Santa Clara, California / Harry L. Stover, chairman/editor ; cooperating orgnization, the International Society for Hybrid Microelectronics.
Series Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 538
Author Heading
Stover, Harry L.
International Society for Hybrid Microelectronics.
Society of Photo-optical Instrumentation Engineers.
Publication, Distribution, etc.
Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering
Publication Date
c1985.
Publication Date (W3CDTF)
1985
Extent
vi, 260 p. : ill. ; 28 cm.