Advances in resist technology and processing II : March 11-12, 1985, Santa Clara, California / Larry F. Thompson, chairman/editor ; cooperating organization, the International Society for Hybrid Microelectronics.

• 資料種別: 図書
• ISBN: 0892525746 (pbk.)
• タイトル: Advances in resist technology and processing II : March 11-12, 1985, Santa Clara, California / Larry F. Thompson, chairman/editor ; cooperating organization, the International Society for Hybrid Microelectronics.
• シリーズタイトル: Proceedings of SPIE--the International Society for Optical Engineering ; v. 539
• 著者標目: Thompson, L. F., 1944-; International Society for Hybrid Microelectronics.; Society of Photo-optical Instrumentation Engineers.
• 出版事項: Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering
• 出版年月日等: c1985.
• 出版年（W3CDTF）: 1985
• 数量: vi, 350 p. : ill. ; 28 cm.
• 出版地（国名コード）: US
• 本文の言語コード: eng
• 著者別名: Thompson, Larry F., 1944-
• 件名標目: Photoresists -- Congresses.
• LCC: TR940
• DDC: 686.2/325
• NDLC: M15; ND
• 書誌注記: Includes bibliographies and index.
• 所蔵機関: 国立国会図書館
• 請求記号: M15-A1317
• 連携機関・データベース: 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• 書誌ID（NDLBibID）: 000003126300; http://id.ndl.go.jp/bib/000003126300
• LC control number: 85050710; https://lccn.loc.gov/85050710
• 整理区分コード: 211