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Advances in resist technology and processing II : March 11-12, 1985, Santa Clara, California / Larry F. Thompson, chairman/editor ; cooperating organization, the International Society for Hybrid Microelectronics. (Proceedings of SPIE--the International Society for Optical Engineering ; v. 539)

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Advances in resist technology and processing II : March 11-12, 1985, Santa Clara, California / Larry F. Thompson, chairman/editor ; cooperating organization, the International Society for Hybrid Microelectronics.

(Proceedings of SPIE--the International Society for Optical Engineering ; v. 539)

Call No. (NDL)
M15-A1317
Bibliographic ID of National Diet Library
000003126300
Material type
図書
Author
Thompson, L. F., 1944-ほか
Publisher
SPIE--the International Society for Optical Engineering
Publication date
c1985.
Material Format
Paper
Capacity, size, etc.
vi, 350 p. : ill. ; 28 cm.
NDC
-
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Paper

Material Type
図書
ISBN
0892525746 (pbk.)
Title
Advances in resist technology and processing II : March 11-12, 1985, Santa Clara, California / Larry F. Thompson, chairman/editor ; cooperating organization, the International Society for Hybrid Microelectronics.
Series Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 539
Author Heading
Thompson, L. F., 1944-
International Society for Hybrid Microelectronics.
Society of Photo-optical Instrumentation Engineers.
Publication, Distribution, etc.
Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering
Publication Date
c1985.
Publication Date (W3CDTF)
1985
Extent
vi, 350 p. : ill. ; 28 cm.
Place of Publication (Country Code)
US