CIM framework : creating an integrated fab solution from the shop floor to the enterprise : Session : Jul 1999, San Francisco, CA.

• 資料種別: 図書
• ISBN: 1892568284 (pbk)
• タイトル: CIM framework : creating an integrated fab solution from the shop floor to the enterprise : Session : Jul 1999, San Francisco, CA.
• 著者標目: Semiconductor Equipment and Materials International.
• 出版事項: Semiconductor Equipment and Materials International
• 出版年月日等: 1999.
• 出版年（W3CDTF）: 1999
• 数量: v.
• 並列タイトル等: Held as part of SEMICON West 99; CIM framework ; SEMICON West ; semiconductor equipment ; integrated fab solution ; shop floor ; enterprise
• NDLC: M17
• 一般注記: Selected papers.; Held as part of SEMICON West 99.; Index term: CIM framework ; SEMICON West ; semiconductor equipment ; integrated fab solution ; shop floor ; enterprise.; BL shelfmark: 8238.654 1999.
• 所蔵機関: 国立国会図書館
• 請求記号: M17-01-2346
• 連携機関・データベース: 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• 書誌ID（NDLBibID）: 000003451123; http://id.ndl.go.jp/bib/000003451123
• UKMARC番号: G06013376
• 整理区分コード: 215