Jump to main content
図書

CIM framework : creating an integrated fab solution from the shop floor to the enterprise : Session : Jul 1999, San Francisco, CA.

Icons representing 図書

CIM framework : creating an integrated fab solution from the shop floor to the enterprise : Session : Jul 1999, San Francisco, CA.

Call No. (NDL)
M17-01-2346
Bibliographic ID of National Diet Library
000003451123
Material type
図書
Author
Semiconductor Equipment and Materials International.
Publisher
Semiconductor Equipment and Materials International
Publication date
1999.
Material Format
Paper
Capacity, size, etc.
v.
NDC
-
View All

Notes on use

Note (General):

Selected papers.Held as part of SEMICON West 99.Index term: CIM framework ; SEMICON West ; semiconductor equipment ; integrated fab solution ; shop fl...

Search by Bookstore

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Paper

Material Type
図書
ISBN
1892568284 (pbk)
Publication Date
1999.
Publication Date (W3CDTF)
1999
Extent
v.
Alternative Title
Held as part of SEMICON West 99
CIM framework ; SEMICON West ; semiconductor equipment ; integrated fab solution ; shop floor ; enterprise
NDLC