5th international symposium on plasma process-induced damage : May 2000, Santa Clara, CA.

• 資料種別: 図書
• ISBN: 0965157741 (pbk)
• タイトル: 5th international symposium on plasma process-induced damage : May 2000, Santa Clara, CA.
• 著者標目: American Vacuum Society. Northern California Chapter.
• 出版事項: American Vacuum Society, Northern California Chapter
• 出版年月日等: 2000.
• 出版年（W3CDTF）: 2000
• 数量: v.
• 並列タイトル等: Also known as P2ID. IEEE cat no 00TH8479; plasma process induced damage ; process induced damage ; P2ID
• NDLC: M17
• 一般注記: Extended abstracts.; Also known as P2ID. IEEE cat no 00TH8479.; Index term: plasma process induced damage ; process induced damage ; P2ID.; BL shelfmark: 4550.30255 5th 2000.
• 所蔵機関: 国立国会図書館
• 請求記号: M17-01-2372
• 連携機関・データベース: 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• 書誌ID（NDLBibID）: 000003451149; http://id.ndl.go.jp/bib/000003451149
• UKMARC番号: G07097618
• 整理区分コード: 215