Micro electro mechanical systems an investigation of micro structures, sensors, actuators, machines and robots : 5th Workshop : Feb 1992, Travemunde, Germany.

著者: Institute of Electrical and Electronics Engineers. Robotics and Automation Society.ほか

資料に関する注記

一般注記：: Papers and programme.Held on fiche. Also known as MEMS '92. IEEE cat no 92CM3093-2.Index term: micro electro mechanical systems ; IEEE ; MEMS....

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資料種別: 図書
ISBN: 0780304977 (softbound)
0780304985 (casebound)
0780304993 (microfiche)
タイトル: Micro electro mechanical systems an investigation of micro structures, sensors, actuators, machines and robots : 5th Workshop : Feb 1992, Travemunde, Germany.
著者標目: Institute of Electrical and Electronics Engineers. Robotics and Automation Society.
Institute of Electrical and Electronics Engineers. German Section.
出版事項: IEEE
出版年月日等: 1992.
出版年（W3CDTF）: 1992
数量: v.
並列タイトル等: Held on fiche. Also known as MEMS '92. IEEE cat no 92CM3093-2
micro electro mechanical systems ; IEEE ; MEMS
資料種別（注記）: [microform]
NDLC: M17
M121
一般注記: Papers and programme.
Held on fiche. Also known as MEMS '92. IEEE cat no 92CM3093-2.
Index term: micro electro mechanical systems ; IEEE ; MEMS.
BL shelfmark: 5756.77945 5th 1992.
所蔵機関: 国立国会図書館
請求記号: M17-93-3078-LS
連携機関・データベース: 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
書誌ID（NDLBibID）: 000003492876
http://id.ndl.go.jp/bib/000003492876
UKMARC番号: G01907823
整理区分コード: 215