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Bibliographic Record
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- Material Type
- 図書
- ISBN
- 0780304977 (softbound)0780304985 (casebound)0780304993 (microfiche)
- Author Heading
- Publication, Distribution, etc.
- Publication Date
- 1992.
- Publication Date (W3CDTF)
- 1992
- Extent
- v.
- Alternative Title
- Held on fiche. Also known as MEMS '92. IEEE cat no 92CM3093-2micro electro mechanical systems ; IEEE ; MEMS
- Note (Material Type)
- [microform]