Micro electro mechanical systems an investigation of micro structures, sensors, actuators, machines and robots : 5th Workshop : Feb 1992, Travemunde, Germany.

Author: Institute of Electrical and Electronics Engineers. Robotics and Automation Society.ほか

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Note (General)：: Papers and programme.Held on fiche. Also known as MEMS '92. IEEE cat no 92CM3093-2.Index term: micro electro mechanical systems ; IEEE ; MEMS....

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Material Type: 図書
ISBN: 0780304977 (softbound)
0780304985 (casebound)
0780304993 (microfiche)
Title: Micro electro mechanical systems an investigation of micro structures, sensors, actuators, machines and robots : 5th Workshop : Feb 1992, Travemunde, Germany.
Author Heading: Institute of Electrical and Electronics Engineers. Robotics and Automation Society.
Institute of Electrical and Electronics Engineers. German Section.
Publication, Distribution, etc.: IEEE
Publication Date: 1992.
Publication Date (W3CDTF): 1992
Extent: v.
Alternative Title: Held on fiche. Also known as MEMS '92. IEEE cat no 92CM3093-2
micro electro mechanical systems ; IEEE ; MEMS
Note (Material Type): [microform]
NDLC: M17
M121
Note (General): Papers and programme.
Held on fiche. Also known as MEMS '92. IEEE cat no 92CM3093-2.
Index term: micro electro mechanical systems ; IEEE ; MEMS.
BL shelfmark: 5756.77945 5th 1992.
Holding library: 国立国会図書館
Call No.: M17-93-3078-LS
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003492876
http://id.ndl.go.jp/bib/000003492876
UKMARC No.: G01907823
Bibliographic Record Category (NDL): 215