Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, analytical techniques for semiconductor materials and process characterization 4, Paris, France and the 202nd meeting of the Electrochemical Society, diagnostic techniques for semiconductor materials and devices 6, Salt Lake City, Utah. : ------.

• 資料種別: 図書
• ISBN: 1566773482 (ECS); 0819449997 (SPIE)
• タイトル: Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, analytical techniques for semiconductor materials and process characterization 4, Paris, France and the 202nd meeting of the Electrochemical Society, diagnostic techniques for semiconductor materials and devices 6, Salt Lake City, Utah. : ------.
• シリーズタイトル: PV ; 2003-03; SPIE Proceedings ; 5133
• タイトル標目: Proceedings (Electrochemical Society) ; v. 99-16, etc.; Proceedings of SPIE -- the International Society for Optical Engineering ; v. 3895, etc.
• 著者標目: Electrochemical Society. Electronics Division. European Committee.; Kolbesen, Bernd O.
• 出版事項: Pennington : Electrochemical Society
• 出版年月日等: c2003.
• 出版年（W3CDTF）: 2003
• 数量: xii, 556 p. : ill. ; 24 cm.
• 出版地（国名コード）: US
• 本文の言語コード: eng
• 件名標目: Semiconductors -- Analysis -- Congresses.
• LCC: QD139.S44
• DDC: 621.3815/2
• NDLC: M17
• 一般注記: Selected papers.; Held at Paris, France, in May 2003, and also held at Salt Lake City, UT, USA, in October 2002.; ALTECH 2003 was Symposium J1 held at the 203rd Meeting of The Electrochemical Society in Paris, France from April 27 to May 2, 2003. Symposium M1, Diagnostic Techniques for Semiconductor Materials and Devices, was part of the 202nd Meeting of the Electrochemical Society held in Salt Lake City, Utah, from October 21 to 25, 2002.
• 書誌注記: Includes bibliographical references and indexes.
• 所蔵機関: 国立国会図書館
• 請求記号: M17-03-5337
• 連携機関・データベース: 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• 書誌ID（NDLBibID）: 000004176818; http://id.ndl.go.jp/bib/000004176818
• RLIN番号: CTYA6262477-S
• 整理区分コード: 215