Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, analytical techniques for semiconductor materials and process characterization 4, Paris, France and the 202nd meeting of the Electrochemical Society, diagnostic techniques for semiconductor materials and devices 6, Salt Lake City, Utah. : ------. (PV ; 2003-03) (SPIE Proceedings ; 5133)

Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, analytical techniques for semiconductor materials and process characterization 4, Paris, France and the 202nd meeting of the Electrochemical Society, diagnostic techniques for semiconductor materials and devices 6, Salt Lake City, Utah. : ------.

(PV ; 2003-03) (SPIE Proceedings ; 5133)

Call No. (NDL): M17-03-5337
Bibliographic ID of National Diet Library: 000004176818

Material type: 図書

Author: Electrochemical Society. Electronics Division. European Committee.ほか

Publisher: Electrochemical Society

Publication date: c2003.

Material Format: Paper

Capacity, size, etc.: xii, 556 p. : ill. ; 24 cm.

NDC: -

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Note (General)：: Selected papers.Held at Paris, France, in May 2003, and also held at Salt Lake City, UT, USA, in October 2002.ALTECH 2003 was Symposium J1 held at the...

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Paper

Material Type: 図書
ISBN: 1566773482 (ECS)
0819449997 (SPIE)
Title: Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, analytical techniques for semiconductor materials and process characterization 4, Paris, France and the 202nd meeting of the Electrochemical Society, diagnostic techniques for semiconductor materials and devices 6, Salt Lake City, Utah. : ------.
Series Title: PV ; 2003-03
SPIE Proceedings ; 5133
Title Heading: Proceedings (Electrochemical Society) ; v. 99-16, etc.
Proceedings of SPIE -- the International Society for Optical Engineering ; v. 3895, etc.
Author Heading: Electrochemical Society. Electronics Division. European Committee.
Kolbesen, Bernd O.
Publication, Distribution, etc.: Pennington : Electrochemical Society
Publication Date: c2003.
Publication Date (W3CDTF): 2003
Extent: xii, 556 p. : ill. ; 24 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Semiconductors -- Analysis -- Congresses.
LCC: QD139.S44
DDC: 621.3815/2
NDLC: M17
Note (General): Selected papers.
Held at Paris, France, in May 2003, and also held at Salt Lake City, UT, USA, in October 2002.
ALTECH 2003 was Symposium J1 held at the 203rd Meeting of The Electrochemical Society in Paris, France from April 27 to May 2, 2003. Symposium M1, Diagnostic Techniques for Semiconductor Materials and Devices, was part of the 202nd Meeting of the Electrochemical Society held in Salt Lake City, Utah, from October 21 to 25, 2002.
Note (Bibliography): Includes bibliographical references and indexes.
Holding library: 国立国会図書館
Call No.: M17-03-5337
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004176818
http://id.ndl.go.jp/bib/000004176818
RLIN No.: CTYA6262477-S
Bibliographic Record Category (NDL): 215