Ultra clean processing of silicon surfaces 5[i.e. 6] : proceedings of the fifth[i.e. sixth] international symposium on ultra clean processing of silicon surfaces (UCPSS 2002) held in Ostend, Belgium, September 2002. : Sep 2002, Ostend, Belgium.

• 資料種別: 図書
• ISBN: 3908450780
• ISSN（シリーズ）: 0377-6883.
• タイトル: Ultra clean processing of silicon surfaces 5[i.e. 6] : proceedings of the fifth[i.e. sixth] international symposium on ultra clean processing of silicon surfaces (UCPSS 2002) held in Ostend, Belgium, September 2002. : Sep 2002, Ostend, Belgium.
• シリーズタイトル: Diffusion and Defect Data, Solid State Data ; Diffusion and Defect Data Part B Solid State Phenomena ; 92
• タイトル標目: Diffusion and defect data. Pt. B, Solid state phenomena ; v. 92.
• 著者標目: Interuniversity Micro-Electronics Center.; Heyns, Marc.; Mertens, Paul.; Meuris, Marc.; International Symposium on Ultra Clean Processing of Silicon Surfaces (6th : 2002 : Ostend, Belgium)
• 出版事項: Uetikon-Zuerich : Scitec Publications Ltd.; Enfield : Scitec Publications Ltd.
• 出版年月日等: c2003.
• 出版年（W3CDTF）: 2003
• 数量: xiii, 311 p. : ill. ; 25 cm.
• 並列タイトル等: Ultra clean processing of silicon surfaces 5[i.e. 6] : proceedings of the 5th[i.e. 6th] international symposium on ultra clean processing of silicon surfaces (UCPSS 2002) held in Ostend, Belgium, September 2002
• 出版地（国名コード）: CH
• 本文の言語コード: eng
• 件名標目: Silicon -- Surfaces -- Congresses.; Contamination control -- Congresses.
• NDLC: M17
• 一般注記: Papers.; "Distributed in the Americas by Trans Tech Publications Inc" -- t. p. verso.; "The Sixth International Symposium on Ultra Clean Processing of Silicon Surface (UCPSS 2002) was also held in Ostend, Belgium on September 16-18, 2002." -- preface.
• 書誌注記: Includes bibliographical references and indexes.
• 所蔵機関: 国立国会図書館
• 請求記号: M17-04-159
• 連携機関・データベース: 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• 書誌ID（NDLBibID）: 000004193421; http://id.ndl.go.jp/bib/000004193421
• RLIN番号: MIUGAUS8214-B
• 整理区分コード: 215