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Ultra clean processing of silicon surfaces 5[i.e. 6] : proceedings of the fifth[i.e. sixth] international symposium on ultra clean processing of silicon surfaces (UCPSS 2002) held in Ostend, Belgium, September 2002. : Sep 2002, Ostend, Belgium. (Diffusion and Defect Data, Solid State Data ; Diffusion and Defect Data Part B Solid State Phenomena ; 92)

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Ultra clean processing of silicon surfaces 5[i.e. 6] : proceedings of the fifth[i.e. sixth] international symposium on ultra clean processing of silicon surfaces (UCPSS 2002) held in Ostend, Belgium, September 2002. : Sep 2002, Ostend, Belgium.

(Diffusion and Defect Data, Solid State Data ; Diffusion and Defect Data Part B Solid State Phenomena ; 92)

Call No. (NDL)
M17-04-159
Bibliographic ID of National Diet Library
000004193421
Material type
図書
Author
Interuniversity Micro-Electronics Center.ほか
Publisher
Scitec Publications Ltd.
Publication date
c2003.
Material Format
Paper
Capacity, size, etc.
xiii, 311 p. : ill. ; 25 cm.
NDC
-
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Papers."Distributed in the Americas by Trans Tech Publications Inc" -- t. p. verso."The Sixth International Symposium on Ultra Clean Processing of Sil...

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Paper

Material Type
図書
ISBN
3908450780
ISSN (series)
0377-6883.
Publication Date
c2003.
Publication Date (W3CDTF)
2003