Chemical-mechanical polishing 2001 -- advances and future challenges : symposium held April 18-20, 2001, San Francisco, California, U.S.A. : Symposium M, "chemical-mechanical polishing 2001 -- advances and future challenges" : 2001 MRS spring meeting : Apr 2001, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 671)
Chemical-mechanical polishing 2001 -- advances and future challenges : symposium held April 18-20, 2001, San Francisco, California, U.S.A. : Symposium M, "chemical-mechanical polishing 2001 -- advances and future challenges" : 2001 MRS spring meeting : Apr 2001, San Francisco, CA.
(Materials Research Society Symposia Proceedings ; 671)