Chemical-mechanical polishing 2001 -- advances and future challenges : symposium held April 18-20, 2001, San Francisco, California, U.S.A. : Symposium M, "chemical-mechanical polishing 2001 -- advances and future challenges" : 2001 MRS spring meeting : Apr 2001, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 671)

Chemical-mechanical polishing 2001 -- advances and future challenges : symposium held April 18-20, 2001, San Francisco, California, U.S.A. : Symposium M, "chemical-mechanical polishing 2001 -- advances and future challenges" : 2001 MRS spring meeting : Apr 2001, San Francisco, CA.

(Materials Research Society Symposia Proceedings ; 671)

Call No. (NDL): M17-03-3220
Bibliographic ID of National Diet Library: 000004199185

Material type: 図書

Author: Babu, S. V.ほか

Publisher: Materials Research Society

Publication date: c2001.

Material Format: Paper

Capacity, size, etc.: 1 v. (various pagings) : ill. ; 24 cm.

NDC: -

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Note (General)：: Selected papers.

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Paper

Material Type: 図書
ISBN: 1558996079
Title: Chemical-mechanical polishing 2001 -- advances and future challenges : symposium held April 18-20, 2001, San Francisco, California, U.S.A. : Symposium M, "chemical-mechanical polishing 2001 -- advances and future challenges" : 2001 MRS spring meeting : Apr 2001, San Francisco, CA.
Series Title: Materials Research Society Symposia Proceedings ; 671
Title Heading: Materials Research Society symposia proceedings ; v. 671.
Author Heading: Babu, S. V.
Cadien, Kenneth Charles, 1951-
Yano, Hiroyuki.
Materials Research Society. Meeting (2001 : San Francisco, Calif.)
Publication, Distribution, etc.: Warrendale : Materials Research Society
Publication Date: c2001.
Publication Date (W3CDTF): 2001
Extent: 1 v. (various pagings) : ill. ; 24 cm.
Alternative Title: Symposium proceedings : spring 2001
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Electrolytic polishing -- Congresses.
Grinding and polishing -- Congresses.
LCC: TS654.5
DDC: 671.7/2
NDLC: M17
Note (General): Selected papers.
Note (Bibliography): Includes bibliographical references and indexes.
Holding library: 国立国会図書館
Call No.: M17-03-3220
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004199185
http://id.ndl.go.jp/bib/000004199185
LC Control Number: 2002282222
https://lccn.loc.gov/2002282222
RLIN No.: DCLC2002282222-B
Bibliographic Record Category (NDL): 215