Design, process integration, and characterization for microelectronics : 6-7 March 2002 : Santa Clara, USA. : conference on design and process integration for microelectronics manufacturing (DPI) : DPI 2002 : SPIE Micro 2002 : Mar 2002, Santa Clara, CA.

• 資料種別: 図書
• ISBN: 0819444391
• ISSN（シリーズ）: 0277-786X
• タイトル: Design, process integration, and characterization for microelectronics : 6-7 March 2002 : Santa Clara, USA. : conference on design and process integration for microelectronics manufacturing (DPI) : DPI 2002 : SPIE Micro 2002 : Mar 2002, Santa Clara, CA.
• シリーズタイトル: SPIE Proceedings ; 4692
• タイトル標目: Proceedings of SPIE -- the International Society for Optical Engineering. v. 4692.
• 著者標目: Starikov, Alexander, 1952-; Tobin, Kenneth W.
• 出版事項: Bellingham : SPIE
• 出版年月日等: c2002.
• 出版年（W3CDTF）: 2002
• 数量: xv, 628 p. : ill. (some color) ; 28 cm.
• 出版地（国名コード）: US
• 本文の言語コード: eng
• 件名標目: Integrated circuits -- Design and construction. -- Congresses.; Integrated circuits -- Defects -- Analysis -- Congresses.; Semiconductors -- Design and construction. -- Congresses.; Semiconductor wafers -- Defects -- Analysis -- Congresses.; Microelectronics industry -- Quality control -- Congresses.; Quality control. -- Congresses.
• NDLC: M17
• 一般注記: Papers.
• 書誌注記: Includes bibliographical references and author index.
• 所蔵機関: 国立国会図書館
• 請求記号: M17-03-4215
• 連携機関・データベース: 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• 書誌ID（NDLBibID）: 000004204088; http://id.ndl.go.jp/bib/000004204088
• RLIN番号: MOHG50514162-B
• 整理区分コード: 215