Design, process integration, and characterization for microelectronics : 6-7 March 2002 : Santa Clara, USA. : conference on design and process integration for microelectronics manufacturing (DPI) : DPI 2002 : SPIE Micro 2002 : Mar 2002, Santa Clara, CA.

• Material Type: 図書
• ISBN: 0819444391
• ISSN (series): 0277-786X
• Title: Design, process integration, and characterization for microelectronics : 6-7 March 2002 : Santa Clara, USA. : conference on design and process integration for microelectronics manufacturing (DPI) : DPI 2002 : SPIE Micro 2002 : Mar 2002, Santa Clara, CA.
• Series Title: SPIE Proceedings ; 4692
• Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering. v. 4692.
• Author Heading: Starikov, Alexander, 1952-; Tobin, Kenneth W.
• Publication, Distribution, etc.: Bellingham : SPIE
• Publication Date: c2002.
• Publication Date (W3CDTF): 2002
• Extent: xv, 628 p. : ill. (some color) ; 28 cm.
• Place of Publication (Country Code): US
• Text Language Code: eng
• Subject Heading: Integrated circuits -- Design and construction. -- Congresses.; Integrated circuits -- Defects -- Analysis -- Congresses.; Semiconductors -- Design and construction. -- Congresses.; Semiconductor wafers -- Defects -- Analysis -- Congresses.; Microelectronics industry -- Quality control -- Congresses.; Quality control. -- Congresses.
• NDLC: M17
• Note (General): Papers.
• Note (Bibliography): Includes bibliographical references and author index.
• Holding library: 国立国会図書館
• Call No.: M17-03-4215
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000004204088; http://id.ndl.go.jp/bib/000004204088
• RLIN No.: MOHG50514162-B
• Bibliographic Record Category (NDL): 215