Crystalline defects and contamination: their impact and control in device manufacturing 3 : DECON 2001 : proceedings of the satellite symposium to ESSDERC 2001 : Nuremberg, Germany. : 31st European solid state device research conference : Sep 2001, Nuremberg, Germany. (PV ; 2001-29)

Crystalline defects and contamination: their impact and control in device manufacturing 3 : DECON 2001 : proceedings of the satellite symposium to ESSDERC 2001 : Nuremberg, Germany. : 31st European solid state device research conference : Sep 2001, Nuremberg, Germany.

(PV ; 2001-29)

国立国会図書館請求記号: M17-03-3785
国立国会図書館書誌ID: 000004214578

資料種別: 図書

著者: Electrochemical Society. Electronics Division. European Committee.ほか

出版者: Electrochemical Society

出版年: c2001.

資料形態: 紙

ページ数・大きさ等: x, 362 p. : ill. ; 24 cm.

NDC: -

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資料に関する注記

一般注記：: Papers."DECON 2001 ... held September 13/14 at Fraunhofer Institute of Integrated Circuits (IIS-B) in Erlangen/Germany" -- Pref.

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紙

資料種別: 図書
ISBN: 1566773636
タイトル: Crystalline defects and contamination: their impact and control in device manufacturing 3 : DECON 2001 : proceedings of the satellite symposium to ESSDERC 2001 : Nuremberg, Germany. : 31st European solid state device research conference : Sep 2001, Nuremberg, Germany.
シリーズタイトル: PV ; 2001-29
タイトル標目: Proceedings (Electrochemical Society) ; v. 2001-29.
著者標目: Electrochemical Society. Electronics Division. European Committee.
Kolbesen, Bernd O.
ESSDERC Committee.
DECON 2001 (2001 : Erlangen, Germany)
European Solid State Device Research Conference (31st : 2001 : Nuremberg, Germany)
出版事項: Pennington : Electrochemical Society
出版年月日等: c2001.
出版年（W3CDTF）: 2001
数量: x, 362 p. : ill. ; 24 cm.
出版地（国名コード）: US
本文の言語コード: eng
件名標目: Integrated circuits -- Very large scale integration -- Congresses.
Crystals -- Defects -- Congresses.
NDLC: M17
一般注記: Papers.
"DECON 2001 ... held September 13/14 at Fraunhofer Institute of Integrated Circuits (IIS-B) in Erlangen/Germany" -- Pref.
書誌注記: Includes bibliographical references and indexes.
所蔵機関: 国立国会図書館
請求記号: M17-03-3785
連携機関・データベース: 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
書誌ID（NDLBibID）: 000004214578
http://id.ndl.go.jp/bib/000004214578
LC control number: 2001092045
https://lccn.loc.gov/2001092045
RLIN番号: CUBGGLAD184906611-B
整理区分コード: 215