Crystalline defects and contamination: their impact and control in device manufacturing 3 : DECON 2001 : proceedings of the satellite symposium to ESSDERC 2001 : Nuremberg, Germany. : 31st European solid state device research conference : Sep 2001, Nuremberg, Germany.
(PV ; 2001-29)
国立国会図書館請求記号
M17-03-3785
国立国会図書館書誌ID
000004214578
資料種別
図書
著者
Electrochemical Society. Electronics Division. European Committee.ほか