Crystalline defects and contamination: their impact and control in device manufacturing 3 : DECON 2001 : proceedings of the satellite symposium to ESSDERC 2001 : Nuremberg, Germany. : 31st European solid state device research conference : Sep 2001, Nuremberg, Germany. (PV ; 2001-29)

Crystalline defects and contamination: their impact and control in device manufacturing 3 : DECON 2001 : proceedings of the satellite symposium to ESSDERC 2001 : Nuremberg, Germany. : 31st European solid state device research conference : Sep 2001, Nuremberg, Germany.

(PV ; 2001-29)

Call No. (NDL): M17-03-3785
Bibliographic ID of National Diet Library: 000004214578

Material type: 図書

Author: Electrochemical Society. Electronics Division. European Committee.ほか

Publisher: Electrochemical Society

Publication date: c2001.

Material Format: Paper

Capacity, size, etc.: x, 362 p. : ill. ; 24 cm.

NDC: -

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Notes on use

Note (General)：: Papers."DECON 2001 ... held September 13/14 at Fraunhofer Institute of Integrated Circuits (IIS-B) in Erlangen/Germany" -- Pref.

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Paper

Material Type: 図書
ISBN: 1566773636
Title: Crystalline defects and contamination: their impact and control in device manufacturing 3 : DECON 2001 : proceedings of the satellite symposium to ESSDERC 2001 : Nuremberg, Germany. : 31st European solid state device research conference : Sep 2001, Nuremberg, Germany.
Series Title: PV ; 2001-29
Title Heading: Proceedings (Electrochemical Society) ; v. 2001-29.
Author Heading: Electrochemical Society. Electronics Division. European Committee.
Kolbesen, Bernd O.
ESSDERC Committee.
DECON 2001 (2001 : Erlangen, Germany)
European Solid State Device Research Conference (31st : 2001 : Nuremberg, Germany)
Publication, Distribution, etc.: Pennington : Electrochemical Society
Publication Date: c2001.
Publication Date (W3CDTF): 2001
Extent: x, 362 p. : ill. ; 24 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Integrated circuits -- Very large scale integration -- Congresses.
Crystals -- Defects -- Congresses.
NDLC: M17
Note (General): Papers.
"DECON 2001 ... held September 13/14 at Fraunhofer Institute of Integrated Circuits (IIS-B) in Erlangen/Germany" -- Pref.
Note (Bibliography): Includes bibliographical references and indexes.
Holding library: 国立国会図書館
Call No.: M17-03-3785
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004214578
http://id.ndl.go.jp/bib/000004214578
LC Control Number: 2001092045
https://lccn.loc.gov/2001092045
RLIN No.: CUBGGLAD184906611-B
Bibliographic Record Category (NDL): 215