2002 IEEE/SEMI advanced semiconductor manufacturing conference and workshop : "advancing the science of semiconductor manufacturing excellence" : ASMC 2002 proceedings : the IEEE/SEMI (...) : April 30-May 2, 2002 : Boston, Massachusetts, USA. : Apr 2002, Boston, MA.

• 資料種別: 図書
• ISBN: 0780371585 (softbound ed.); 0780371593 (microfiche ed.)
• ISSN: 1078-8743
• タイトル: 2002 IEEE/SEMI advanced semiconductor manufacturing conference and workshop : "advancing the science of semiconductor manufacturing excellence" : ASMC 2002 proceedings : the IEEE/SEMI (...) : April 30-May 2, 2002 : Boston, Massachusetts, USA. : Apr 2002, Boston, MA.
• 著者標目: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (13th : 2002 : Boston, Massachusetts)
• 出版事項: Piscataway : IEEE; San Jose : SEMI
• 出版年月日等: c2002.
• 出版年（W3CDTF）: 2002
• 数量: v, 430 p. : ill. ; 28 cm.
• 並列タイトル等: The 13th annual IEEE/SEMI advanced semiconductor manufacturing conference : advancing the science and technology of semiconductor manufacturing : ASMC 2002; ASMC 2002 proceedings : 13th annual advanced semiconductor manufacturing conference and workshop
• 出版地（国名コード）: US
• 本文の言語コード: eng
• 件名標目: Semiconductor industry -- Congresses.; Semiconductors -- Design and construction -- Congresses.; Process control -- Congresses.
• LCC: TK7836
• NDLC: M17
• 一般注記: Papers.; IEEE cat no 02CH37259.
• 書誌注記: Includes bibliographical references.
• 別の媒体に関する注記: Also available via the World Wide Web.
• 所蔵機関: 国立国会図書館
• 請求記号: M17-03-3907
• 連携機関・データベース: 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• 書誌ID（NDLBibID）: 000004220034; http://id.ndl.go.jp/bib/000004220034
• RLIN番号: FLUGANT9121-B
• 整理区分コード: 215