2002 IEEE/SEMI advanced semiconductor manufacturing conference and workshop : "advancing the science of semiconductor manufacturing excellence" : ASMC 2002 proceedings : the IEEE/SEMI (...) : April 30-May 2, 2002 : Boston, Massachusetts, USA. : Apr 2002, Boston, MA.

• Material Type: 図書
• ISBN: 0780371585 (softbound ed.); 0780371593 (microfiche ed.)
• ISSN: 1078-8743
• Title: 2002 IEEE/SEMI advanced semiconductor manufacturing conference and workshop : "advancing the science of semiconductor manufacturing excellence" : ASMC 2002 proceedings : the IEEE/SEMI (...) : April 30-May 2, 2002 : Boston, Massachusetts, USA. : Apr 2002, Boston, MA.
• Author Heading: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (13th : 2002 : Boston, Massachusetts)
• Publication, Distribution, etc.: Piscataway : IEEE; San Jose : SEMI
• Publication Date: c2002.
• Publication Date (W3CDTF): 2002
• Extent: v, 430 p. : ill. ; 28 cm.
• Alternative Title: The 13th annual IEEE/SEMI advanced semiconductor manufacturing conference : advancing the science and technology of semiconductor manufacturing : ASMC 2002; ASMC 2002 proceedings : 13th annual advanced semiconductor manufacturing conference and workshop
• Place of Publication (Country Code): US
• Text Language Code: eng
• Subject Heading: Semiconductor industry -- Congresses.; Semiconductors -- Design and construction -- Congresses.; Process control -- Congresses.
• LCC: TK7836
• NDLC: M17
• Note (General): Papers.; IEEE cat no 02CH37259.
• Note (Bibliography): Includes bibliographical references.
• Note (Additional Physical Form Available): Also available via the World Wide Web.
• Holding library: 国立国会図書館
• Call No.: M17-03-3907
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000004220034; http://id.ndl.go.jp/bib/000004220034
• RLIN No.: FLUGANT9121-B
• Bibliographic Record Category (NDL): 215