MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001 : San Francisco, USA. : Oct 2001, San Francisco, CA. (SPIE Proceedings ; 4559)
MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001 : San Francisco, USA. : Oct 2001, San Francisco, CA.
(SPIE Proceedings ; 4559)
国立国会図書館請求記号
M17-03-4567
国立国会図書館書誌ID
000004240701
資料種別
図書
著者
Semiconductor Equipment and Materials International (SEMI)ほか