MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001 : San Francisco, USA. : Oct 2001, San Francisco, CA. (SPIE Proceedings ; 4559)

MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001 : San Francisco, USA. : Oct 2001, San Francisco, CA.

(SPIE Proceedings ; 4559)

Call No. (NDL): M17-03-4567
Bibliographic ID of National Diet Library: 000004240701

Material type: 図書

Author: Semiconductor Equipment and Materials International (SEMI)ほか

Publisher: SPIE

Publication date: c2001.

Material Format: Paper

Capacity, size, etc.: xxvii, 190 p. : ill. ; 28 cm.

NDC: -

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Note (General)：: Papers.

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Paper

Material Type: 図書
ISBN: 0819442879
ISSN (series): 0277-786X
Title: MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001 : San Francisco, USA. : Oct 2001, San Francisco, CA.
Series Title: SPIE Proceedings ; 4559
Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering. v. 4559.
Author Heading: Semiconductor Equipment and Materials International (SEMI)
Helvajian, Henry.
Janson, Siegfried W.
Lärmer, Franz.
Publication, Distribution, etc.: Bellingham : SPIE
Publication Date: c2001.
Publication Date (W3CDTF): 2001
Extent: xxvii, 190 p. : ill. ; 28 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Microelectromechanical systems -- Design and construction -- Congresses.
Microelectromechanical systems -- Industrial applications -- Congresses.
Manufacturing processes -- Congresses.
NDLC: M17
Note (General): Papers.
Note (Bibliography): Includes bibliographic references and author index.
Holding library: 国立国会図書館
Call No.: M17-03-4567
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004240701
http://id.ndl.go.jp/bib/000004240701
RLIN No.: MOHG48547410-B
Bibliographic Record Category (NDL): 215