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Proceedings of the Forum on the Science and Technology of Silicon Materials 2003

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Proceedings of the Forum on the Science and Technology of Silicon Materials. 2003

国立国会図書館請求記号
M18-B303
国立国会図書館書誌ID
000004323975
資料種別
図書
著者
edited by H. Yamada-Kaneta, K. Sumino
出版者
Japan Technical Information Service
出版年
c2003
資料形態
紙
ページ数・大きさ等
340 p. ; 30 cm
NDC
-
すべて見る

資料に関する注記

一般注記：

Held at Shonan Village Center, Kanagawa, Nov. 25-27, 2003

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目次

  • A. General

  • 1. Crossing of basic research of crystal defects and silicon material technology/ 1

    K.Sumino (Professor Emeritus, Tohoku University)

  • B. Quality and Technology Required for the Wafers in the Coming Generation

  • 2. Wafer quality requirements from the next generation processes and devices/ 19

    Tetsuo Fukuda (FUJITSU LTD)||Seiichiro Kobayashi (Renesas Eastern Japan Semiconductor Inc.)||Masanori Yoshise (JAPAN ADE LTD)

  • 3. Device physics and technology of strained-Si MOSFETs/ 26

    S.Takagi (National Institute of Advanced Industrial Science and Technology: (AIST)||T.Tezuka (The University of Tokyo)||N.Sugiyama (MIRAI Project, Association of Super-Advanced Electronics Technology: ASET)||T.Mizuno (MIRAI Project, Association of Super-Advanced Electronics Technology: ASET)||T.Numata (MIRAI Project, Association of Super-Advanced Electronics Technology: ASET)||Y.Moriyama (MIRAI Project, Association of Super-Advanced Electronics Technology: ASET)||K.Usuda (MIRAI Project, Association of Super-Advanced Electronics Technology: ASET)||S.Nakaharai (MIRAI Project, Association of Super-Advanced Electronics Technology: ASET)||J.Koga (MIRAI Project, Association of Super-Advanced Electronics Technology: ASET)||A.Tanabe (MIRAI Project, Association of Super-Advanced Electronics Technology: ASET)||N.Hirashita (MIRAI Project, Association of Super-Advanced Electronics Technology: ASET)||T.Maeda (National Institute of Advanced Industrial Science and Technology: (AIST)

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書誌情報

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紙

資料種別
図書
タイトル
Proceedings of the Forum on the Science and Technology of Silicon Materials
巻次・部編番号
2003
著者・編者
edited by H. Yamada-Kaneta, K. Sumino
著者標目
角野, 浩二, 1931- スミノ, コウジ, 1931- ( 00332219 )典拠
金田, 寛 カネタ, ヒロシ ( 00939685 )典拠
出版事項
Tokyo : Japan Technical Information Service
出版年月日等
c2003
出版年（W3CDTF）
2003
数量
340 p.
大きさ
30 cm