Proceedings of the Forum on the Science and Technology of Silicon Materials. 2003

• Material Type: 図書
• Title: Proceedings of the Forum on the Science and Technology of Silicon Materials
• Volume: 2003
• Author/Editor: edited by H. Yamada-Kaneta, K. Sumino
• Author Heading: 角野, 浩二, 1931- スミノ, コウジ, 1931- ( 00332219 )Authorities; 金田, 寛 カネタ, ヒロシ ( 00939685 )Authorities
• Publication, Distribution, etc.: Tokyo : Japan Technical Information Service
• Publication Date: c2003
• Publication Date (W3CDTF): 2003
• Extent: 340 p.
• Size: 30 cm
• Place of Publication (Country Code): JP
• Text Language Code: eng
• NDLC: M18; ND371
• Target Audience: 一般
• Note (General): Held at Shonan Village Center, Kanagawa, Nov. 25-27, 2003
• Holding library: 国立国会図書館
• Call No.: M18-B303
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000004323975; http://id.ndl.go.jp/bib/000004323975
• National Bibliography No. (JPNO): 20547839
• Cataloging Rule: Nippon Cataloguing Rules 1987 Revised Edition
• Bibliographic Record Category (NDL): 113

Table of Contents

A. General

1. Crossing of basic research of crystal defects and silicon material technology/ 1

B. Quality and Technology Required for the Wafers in the Coming Generation

2. Wafer quality requirements from the next generation processes and devices/ 19

3. Device physics and technology of strained-Si MOSFETs/ 26