Chemical mechanical planarization 6 : proceedings of the international symposium. : 6th internatioal symposium on chemical mechanical plananrization[i.e. planarization] (CMP) in integrated circuit device manufacturing : 204th meeting of the Electrochemical Society : Oct 2003, Orlando, FL. (PV ; 2003-21)
Chemical mechanical planarization 6 : proceedings of the international symposium. : 6th internatioal symposium on chemical mechanical plananrization[i.e. planarization] (CMP) in integrated circuit device manufacturing : 204th meeting of the Electrochemical Society : Oct 2003, Orlando, FL.
Papers."This volume is the proceedings of the 6th International Symposium on Chemical Mechanical Plananrization (CMP) in Integrated Circuit Device Man...
"This volume is the proceedings of the 6th International Symposium on Chemical Mechanical Plananrization (CMP) in Integrated Circuit Device Manufacturing held at the 204th Meeting of the Electrochemical Society, in Orlando, Florida from October 12th to 17th, 2003." -- pref.