Silicon front-end junction formation -- physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A. : symposium C, "silicon front-end junction formation -- physics and technology" : 2004 MRS spring meeting : Apr 2004, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 810)
Silicon front-end junction formation -- physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A. : symposium C, "silicon front-end junction formation -- physics and technology" : 2004 MRS spring meeting : Apr 2004, San Francisco, CA.
(Materials Research Society Symposia Proceedings ; 810)
Papers." (...) Symposium C, 'Silicon Front-End Junction Formation -- Physics and Technology, ' was held April 13-15 at the 2004 MRS Spring Meeting in ...
" (...) Symposium C, 'Silicon Front-End Junction Formation -- Physics and Technology, ' was held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California." -- p. xv.