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Silicon front-end junction formation -- physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A. : symposium C, "silicon front-end junction formation -- physics and technology" : 2004 MRS spring meeting : Apr 2004, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 810)

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Silicon front-end junction formation -- physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A. : symposium C, "silicon front-end junction formation -- physics and technology" : 2004 MRS spring meeting : Apr 2004, San Francisco, CA.

(Materials Research Society Symposia Proceedings ; 810)

Call No. (NDL)
M17-04-3524
Bibliographic ID of National Diet Library
000007522414
Material type
図書
Author
Pichler, P. (Peter)ほか
Publisher
Materials Research Society
Publication date
c2004.
Material Format
Paper
Capacity, size, etc.
xvi, 494 p. : ill. ; 24 cm.
NDC
-
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Paper

Material Type
図書
ISBN
1558997601
Publication, Distribution, etc.
Publication Date
c2004.
Publication Date (W3CDTF)
2004
Extent
xvi, 494 p. : ill. ; 24 cm.