2004 IEEE/SEMI advanced semiconductor manufacturing conference and workshop : "advancing the science and technology of semiconductor manufacturing excellence" : ASMC 2004 proceedings : May 4-6, 2004 : Boston, Massachusetts, USA. : May 2004, Boston, MA.

• 資料種別: 図書
• ISBN: 0780383125
• ISSN: 1078-8743
• タイトル: 2004 IEEE/SEMI advanced semiconductor manufacturing conference and workshop : "advancing the science and technology of semiconductor manufacturing excellence" : ASMC 2004 proceedings : May 4-6, 2004 : Boston, Massachusetts, USA. : May 2004, Boston, MA.
• 著者標目: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (15th : 2004 : Boston, Massachusetts)
• 出版事項: Piscataway : IEEE; San Jose : SEMI
• 出版年月日等: c2004.
• 出版年（W3CDTF）: 2004
• 数量: xi, 507 p. : ill. ; 28 cm.
• 並列タイトル等: The 15th annual IEEE/SEMI advanced semiconductor manufacturing conference and workshop : ASMC 2004 : 2004 conference sessions: advanced metrology and (...) : May 4-6, 2004 : Seaport Hotel : Boston, Massachusetts, USA
• 出版地（国名コード）: US
• 本文の言語コード: eng
• 件名標目: Semiconductor industry. -- Congresses.; Semiconductors -- Design and construction. -- Congresses.; Process control. -- Congresses.
• NDLC: M17
• 一般注記: Papers.; IEEE cat no 04CH37530.
• 書誌注記: Includes bibliographic references.
• 別の媒体に関する注記: Also available via the World Wide Web.
• 所蔵機関: 国立国会図書館
• 請求記号: M17-04-3483
• 連携機関・データベース: 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• 書誌ID（NDLBibID）: 000007543726; http://id.ndl.go.jp/bib/000007543726
• RLIN番号: MOHG55153362-B
• 整理区分コード: 215