2004 IEEE/SEMI advanced semiconductor manufacturing conference and workshop : "advancing the science and technology of semiconductor manufacturing excellence" : ASMC 2004 proceedings : May 4-6, 2004 : Boston, Massachusetts, USA. : May 2004, Boston, MA.

• Material Type: 図書
• ISBN: 0780383125
• ISSN: 1078-8743
• Title: 2004 IEEE/SEMI advanced semiconductor manufacturing conference and workshop : "advancing the science and technology of semiconductor manufacturing excellence" : ASMC 2004 proceedings : May 4-6, 2004 : Boston, Massachusetts, USA. : May 2004, Boston, MA.
• Author Heading: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (15th : 2004 : Boston, Massachusetts)
• Publication, Distribution, etc.: Piscataway : IEEE; San Jose : SEMI
• Publication Date: c2004.
• Publication Date (W3CDTF): 2004
• Extent: xi, 507 p. : ill. ; 28 cm.
• Alternative Title: The 15th annual IEEE/SEMI advanced semiconductor manufacturing conference and workshop : ASMC 2004 : 2004 conference sessions: advanced metrology and (...) : May 4-6, 2004 : Seaport Hotel : Boston, Massachusetts, USA
• Place of Publication (Country Code): US
• Text Language Code: eng
• Subject Heading: Semiconductor industry. -- Congresses.; Semiconductors -- Design and construction. -- Congresses.; Process control. -- Congresses.
• NDLC: M17
• Note (General): Papers.; IEEE cat no 04CH37530.
• Note (Bibliography): Includes bibliographic references.
• Note (Additional Physical Form Available): Also available via the World Wide Web.
• Holding library: 国立国会図書館
• Call No.: M17-04-3483
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000007543726; http://id.ndl.go.jp/bib/000007543726
• RLIN No.: MOHG55153362-B
• Bibliographic Record Category (NDL): 215