Radio frequency power in plasmas : 16th topical conference on radio frequency power in plasmas : Park City, Utah 11-13 April 2005. : Apr 2005, Park City, UT. (AIP Conference Proceedings ; 787)
Radio frequency power in plasmas : 16th topical conference on radio frequency power in plasmas : Park City, Utah 11-13 April 2005. : Apr 2005, Park City, UT.