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Radio frequency power in plasmas : 16th topical conference on radio frequency power in plasmas : Park City, Utah 11-13 April 2005. : Apr 2005, Park City, UT. (AIP Conference Proceedings ; 787)

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Radio frequency power in plasmas : 16th topical conference on radio frequency power in plasmas : Park City, Utah 11-13 April 2005. : Apr 2005, Park City, UT.

(AIP Conference Proceedings ; 787)

Call No. (NDL)
M17-05-2674
Bibliographic ID of National Diet Library
000008001838
Material type
図書
Author
Wukitch, Stephen J.ほか
Publisher
American Institute of Physics
Publication date
2005.
Material Format
Paper
Capacity, size, etc.
xiii, 457 p. : ill. ; 25 cm.
NDC
-
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Paper

Material Type
図書
ISBN
0735402760
ISSN (series)
0094-243X
Title
Radio frequency power in plasmas : 16th topical conference on radio frequency power in plasmas : Park City, Utah 11-13 April 2005. : Apr 2005, Park City, UT.
Series Title
AIP Conference Proceedings ; 787
Author Heading
Wukitch, Stephen J.
Topical Conference on Radio Frequency Power in Plasmas (16th : 2005 : Park City, Utah)
Publication, Distribution, etc.
Melville : American Institute of Physics
Publication Date
2005.
Publication Date (W3CDTF)
2005
Extent
xiii, 457 p. : ill. ; 25 cm.