Design and process integration for microelectronic manufacturing 4 : 23-24 February 2006 : San Jose, California, USA. : 4th conference on design and process integration (DPI) for microelectronic manufacturing : Feb 2006, San Jose, CA.

• 資料種別: 図書
• ISBN: 0819461997
• ISSN（シリーズ）: 0277-786X
• タイトル: Design and process integration for microelectronic manufacturing 4 : 23-24 February 2006 : San Jose, California, USA. : 4th conference on design and process integration (DPI) for microelectronic manufacturing : Feb 2006, San Jose, CA.
• シリーズタイトル: SPIE Proceedings ; 6156
• タイトル標目: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 6156.
• 著者標目: SEMATECH, Inc.; Wong, Alfred Kwok-Kit.; Singh, Vivek K.
• 出版事項: Bellingham : SPIE
• 出版年月日等: c2006.
• 出版年（W3CDTF）: 2006
• 数量: 1 v. (various pagings) : ill. ; 28 cm.
• 出版地（国名コード）: US
• 本文の言語コード: eng
• 件名標目: Integrated circuits -- Design and construction. -- Congresses.; Integrated circuits -- Defects -- Analysis -- Congresses.; Semiconductors -- Design and construction. -- Congresses.; Semiconductor wafers -- Defects -- Analysis -- Congresses.; Microelectronics industry -- Quality control -- Congresses.; Quality control. -- Congresses.
• LCC: TK7874
• NDLC: M17
• 一般注記: Papers.
• 書誌注記: Includes bibliographic references and author index.
• 所蔵機関: 国立国会図書館
• 請求記号: M17-06-1862
• 連携機関・データベース: 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• 書誌ID（NDLBibID）: 000008232270; http://id.ndl.go.jp/bib/000008232270
• RLIN番号: MOHG70078980-B
• 整理区分コード: 215