Design and process integration for microelectronic manufacturing 4 : 23-24 February 2006 : San Jose, California, USA. : 4th conference on design and process integration (DPI) for microelectronic manufacturing : Feb 2006, San Jose, CA.

• Material Type: 図書
• ISBN: 0819461997
• ISSN (series): 0277-786X
• Title: Design and process integration for microelectronic manufacturing 4 : 23-24 February 2006 : San Jose, California, USA. : 4th conference on design and process integration (DPI) for microelectronic manufacturing : Feb 2006, San Jose, CA.
• Series Title: SPIE Proceedings ; 6156
• Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 6156.
• Author Heading: SEMATECH, Inc.; Wong, Alfred Kwok-Kit.; Singh, Vivek K.
• Publication, Distribution, etc.: Bellingham : SPIE
• Publication Date: c2006.
• Publication Date (W3CDTF): 2006
• Extent: 1 v. (various pagings) : ill. ; 28 cm.
• Place of Publication (Country Code): US
• Text Language Code: eng
• Subject Heading: Integrated circuits -- Design and construction. -- Congresses.; Integrated circuits -- Defects -- Analysis -- Congresses.; Semiconductors -- Design and construction. -- Congresses.; Semiconductor wafers -- Defects -- Analysis -- Congresses.; Microelectronics industry -- Quality control -- Congresses.; Quality control. -- Congresses.
• LCC: TK7874
• NDLC: M17
• Note (General): Papers.
• Note (Bibliography): Includes bibliographic references and author index.
• Holding library: 国立国会図書館
• Call No.: M17-06-1862
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000008232270; http://id.ndl.go.jp/bib/000008232270
• RLIN No.: MOHG70078980-B
• Bibliographic Record Category (NDL): 215