Reliability, packaging, testing, and characterization of MEMS/MOEMS 6 : 23-24 January 2007 : San Jose, California, USA. : reliability, packaging, testing, and characterization of MEMS/MOEMS conference : photonics west 2007 : MOEMS-MEMS 2007 micro-nano fabrication symposium : Jan 2007, San Jose, CA.

• 資料種別: 図書
• ISBN: 9780819465764
• ISSN（シリーズ）: 0277-786X
• タイトル: Reliability, packaging, testing, and characterization of MEMS/MOEMS 6 : 23-24 January 2007 : San Jose, California, USA. : reliability, packaging, testing, and characterization of MEMS/MOEMS conference : photonics west 2007 : MOEMS-MEMS 2007 micro-nano fabrication symposium : Jan 2007, San Jose, CA.
• シリーズタイトル: SPIE Proceedings ; 6463
• タイトル標目: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 6463.
• 著者標目: Hartzell, Allyson L.; Ramesham, Rajeshuni.
• 出版事項: Bellingham : SPIE
• 出版年月日等: c2007.
• 出版年（W3CDTF）: 2007
• 数量: 1 v. (various pagings) : ill. ; 28 cm.
• 出版地（国名コード）: US
• 本文の言語コード: eng
• 件名標目: Microelectromechanical systems -- Reliability -- Congresses.; Microelectromechanical systems -- Testing -- Congresses.; Microelectronic packaging -- Congresses.
• LCC: TK7875
• DDC: 621.381
• NDLC: M17
• 一般注記: Papers.; "This conference has been held for several years in row." -- introd.
• 書誌注記: Includes bibliographical references and author index.
• 所蔵機関: 国立国会図書館
• 請求記号: M17-07-998
• 連携機関・データベース: 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• 書誌ID（NDLBibID）: 000008514863; http://id.ndl.go.jp/bib/000008514863
• LC control number: 2007296136; https://lccn.loc.gov/2007296136
• OCLC番号: 85099675; https://www.worldcat.org/oclc/85099675
• 整理区分コード: 215